Semiconductor Manufacturing Technology II
Hong Xiao, Ph. D.
Phone: 223-6143
Class hour: 1:00 to 3:40 pm
or 6:00 to 8:40 pm, Moday
Office Hours: 12:00 to 1:00
pm and 5:00 to 6:00 pm, Monday
Prerequisites: CHM 1634
Week 2 09/04 Labor day
Week 3 09/11 CMOS process flow Notes
Week 4 09/17 Photolithography I Notes
Week 5 09/25 Photolithography II Notes, Chapter 8
Week 6 10/02 Photolithography III Notes, Chapter 9
Week 7 10/09 Review and Test 1
Week 8 10/16 Plasma basics Notes
Week 9 10/23 Etch Processes I Notes
Week 10 10/30 Etch Processes II Notes
Week 11 11/06 Review and Test 2
Week 12 11/13 Diffusion Ion implantation I Chapter 11,
Notes
Week 13 11/20 Diffusion Ion implantation II Chapter 11, Notes
11/22 Last day to drop
Week 14 11/27 Test and packaging
Week 15 12/04 Review
Week 16 12/11 Final Exam
Student Responsibilities:
Attendance
is critical. Not all materials covered in the class will be in the textbook.
This class is designed to be an interactive exchange between instructor and
class participants. What you learn and are tested on will be based upon class
discussions and class notes. Tests cannot be “made up” unless prior
arrangements are made with the instructor on an emergency occurs. Late tests will receive an automatic
deduction of 10% of test score while
no punishment for early test. Students are expected to prepare for each class
session by reading the assigned materials prior to the class in which they will
be discussed. If anyone fells unable to achieve the desired grade for this
class for any reason or reasons, be advised that the last day to drop from the
class is November 21. Fail to drop
may result an F in the final grade
which will be on ACC record forever.
Reference Texts:
·
Semiconductor Manufacturing
Technology, yesterday, today and tomorrow, by Hong Xiao
·
Microchip Fabrication, Third Edition, by Peter Van Zant, McGraw-Hill,
©1997
Course Performance Measurements:
Test
1 =
30% of final grade
Test
2 = 30% of final grade
Comprehensive
Final Exam = 40% of final grade
Test and Exam Policy:
Close
book, close notes. One “cheat sheet” on 8” by 11˝’’ is allowed. You can write
anything you feel important on both side of the sheet.
Extra credit project:
Available
upon request in person, on first come first serve base.