MEMS Design at Austin Community College

Austin Community College, working with Sandia Labs, has created a MEMS Design class using the tools and process technology developed by Sandia Labs. While the specific design exercises use these tools and technologies, the theory, fabrication processes and materials are standard to the industry and have broad application in this emerging growth industry. The course number is DFTG-1495 MEMS and is normally taught in the Spring semester.

What are Microelectromechanical systems?

MEMS are made up of components between 1 to 100 micrometres in size (i.e. 0.001 to 0.1 mm) and MEMS devices generally range in size from 20 micrometres (20 millionths of a metre) to a millimetre. They usually consist of a central unit that processes data, the microprocessor and several components that interact with the outside such as micro Sensors and micro Actuators. At these size scales, the standard constructs of classical physics do not always hold true. Due to MEMS' large surface area to volume ratio, surface effects such as electrostatics and wetting dominate volume effects such as inertia or thermal mass.

The Perquisites

MEMS devices are designed much the same way as classical mechanical design structures. The devices are made of silicon rather than metal and are constructed using nearly the same technologies as are used in the Semiconductor industry. The standard mechanical design tool is AutoCAD. Sandia has created extensions that work with AutoCAD to support he layered structure of these extremely small devices. A working nowlegde of AutoCAD will be required. This is normally satisfied by taking DFTG-1404. DFTG 1433 strongly recommended.